งานวิจัย (Publications)
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Publication Details
Publication Name Redeposition-free of silicon etching by CF4 microwave plasma ina medium vacuum process regime
First Author Pakpum, C.
Author Prof. Dr.Dheerawan Boonyawan,
Corresponding Author Pakpum, C.
Year2020
https://www.scopus.com/record/display.uri?eid=2-s2.0-85086068373&origin=inward&txGid=4c3102d6cff272eb25c688676241f428