งานวิจัย (Publications)
รายละเอียดงานวิจัย
Publication Details
Publication Name SiCxHy-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures
First Author Jun S. Lee
Author Dr.Norrapon Vichiansan, Assoc. Prof. Dr.Komgrit Leksaku, Su B. Jin, Jeon G. Han , M. Hori
Corresponding Author Jeon G. Han
Year2015
https://www.researchgate.net/publication/282636075_SiCxHy-based_hydrophobic_thin_films_with_good_chemical_and_mechanical_properties_synthesized_by_PECVD_at_various_substrate_temperatures