งานวิจัย (Publications)
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Publication Details
Publication Name Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma
First Author M. D. Bowden
Author Asst. Prof. Dr.Pradoong Suanpoot, R. Tabata, K. Uchino, K. Muraoka, M. Noguchi
Corresponding Author
Year2001
https://pubs.aip.org/aip/jap/article-abstract/90/5/2158/473103/Measurements-of-the-electron-energy-distribution?redirectedFrom=fulltext